Products

  • Intelligent Nitrogen Cabinet
WIP solution

Intelligent Nitrogen Cabinet

N2 purging is based on humidity level or oxygen concentration. When humidity or oxygen concentration exceeds the default value, the control system will automatically inject N2. When humidity drops to default value, the control system will automatically stop N2 injection.

  • Conventional N2 cabinet does not have humidity sensor or controller. It simply injects N2 non-stop, wasting N2 and ineffective drying. With N2 control system, the LED display is able to show the humidity data and stop unnecessary N2 injection, achieving effective control and saves huge expenses on N2.
  • Choose N2 cabinet with automated door for automated lot material handling. 
  • Logs available for lot material tracking.
  • Record humidity and oxygen concentration, ensuring a safe and reliable storage.
  • Lot storage timing record, issues alarm when exceeds storage time.
  • Lot search function, able to track lot information from host server.
  • Integrated information, central management.
  • Support SECS.
  • Humidity / Temperature accuracy: +/-3.0% RH, +/- 1.0 degC
  • Humidity Range: 1% ~ 50% RH
  • General Specs:
  • Stainless steel, suitable for cleanroom
  • Humidity and temperature display
  • Monitoring and recording functions
  • Alarm notification system
  • Humidity sensing, N2 control function
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