Mobile Cobot solution
i-Operator(Model: iTS-FOUP/FOSB)
i-Operator is a semi-humanoid robot series, integrating a mobile robot (AMR) with a collaborative robot arm (Cobot). It resembles a human operator loading and unloading production lots in semiconductor manufacturing. The production lots may come in various form such as Reticle Pod, Open Cassette, SMIF, FOUP, FOSB, Frame Cassette, Magazine, JEDEC Tray, Shipping Box, etc. i-Operator has many end-effector designs to meet the handling requirement for different lot types.
- Automatic navigation and path planning, no guiding tracks needed.
- Autonomously avoid obstacles. If path is blocked, it re-routes automatically
- Automatic path reconfiguring
- Comprehensive safety detection and protection for material handling. (E84 / light curtain / vertical laser / low laser / rear laser / end-effector sensor, etc)
- Remote monitoring capability.
- Automatic docking capability.
- Wifi communications. Optional to use 4G LTE / 5G.
- Optional RFID / Bar Code Reader.
- Max payload (robot arm): 10kg / 12kg (exclude end-effector)
- Application: FOSB / FOUP. Max FOSB / FOUP on iTS: 2.
- Charging time: 40min (20%~100%)
- Option to use Automatic Battery Exchange Station instead of Docking Station. Battery exchange time: 2min.
- SEMI S2 compliant. Suitable for semiconductor industry.